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Effects of processing force on performance of nano-resonators produced by magnetron sputtering depos
- M. Shaat
- Nov 28, 2017
- 1 min read
Effects of magnetron sputtering on surface textures and mechanics of nano-resonators are investigated. A hybrid experimental-analytical mechanics is employed and applied to FeNiCr-alloy resonators. This work is accepted in Physica E.
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